SCANNING THRESHOLD PARTICLE COUNTER MODEL 9010

1. NANOPARTICLE MEASUREMENTSOLUTIONS Scanning Threshold Particle Counter (STPC) Model9010 Monitor UPW System Health andStability Counting EfficiencyComparison • 50% detection efficiency at 10nm • Real-time, on-line nano particlemonitor • Counts particles of any shape, any refractive index, any composition • Great for monitoring organics, colloidal silica, resin beds, and other yield killers in UPW that traditional OPC’smiss 120 100 75 50 25 0 Counting Efficiency(%) 5 10 2050 Particle Size(nm) Kanomax STPC (ColloidalSilicaChallenge) PMS UDI-20 (PSLChallenge) PMS data from the PMS Publication “Monitoring of ultrapure water (UPW) systems using the Ultra DI® 20 Liquid Particle Counter, Rev 5,06.16.2015” • IndustryRecognition • The STPC is used for compliance with SEMI C79 “Guide to Evaluate the Efficacy of Sub-15 nm Filtersused • in Ultrapure Water (UPW) Distribution Systems.” • The STPC is used for compliance with the SEMI C93 “Guide for Determining the Quality of Ion Exchanged Resin used in Polish Applications of Ultrapure Water (UPW)Systems.” Online UPW SystemMonitoring 120 100 80 60 40 20 0 -20 -40 -60 -80 -100 120 UF-D Startup UF Isolation STPC detects particle excursion before wafer defectreview 100 STPC Particles (Normalized%) Normalized Hot UPW Supply and Tool Particles(%) OPC1-30nm 80 OPC 2 - 50nm OPC 3 - 50nm 60 40 STPC data correlates well with tool NPW waferscans 20 0 • 11/6/16 11/7/16 11/8/16 11/9/16 11/10/16 • STPC >10 nm Particles • STPC >15 nm Particles • STPC >20 nm Particles ▲Tool 1 NPW Particle Data ●Tool 2 NPW Particle Data Lee et. all, UPW Micro 2017 Conference, Portland,OR.

2. Principle ofOperation UPWSample Nebulization PrimaryLarge (2-3mL/min) DropRemoval (~2µL/min) SecondaryLargeEvaporation DropRemoval (~1.5µL/min) SizeSelective Condensation Growth Optical Detection Impactor1 Impactor2 Condensation ParticleCounter GasIn Real-time DataDisplay Concentration (#/mL) vs. Time(h) Specifications Measurement range: 1E3 to 1E10particles/mL Inspection volume rate: 1-5μL/min Threshold sizes: 10-20 nm user selectable in 5 nm increments (50% detectionefficiency) Number of size channels: 1-3 (user configurable) Dead time between channel adjustment: 2-5 minutes Total flow rate: 50-280mL/min Response time to concentration change: <30seconds Inlet water pressure (online): 200-500 kPa (30-70psig) Compressed air/nitrogen flow rate/pressure: 2.5 std L/min CDA or Nitrogen, 340-410 kPa (50-60 psi) ANSI IS08573-1:2010 Class 2 for compressedair Maximum UPW nonvolatile residue: 200 ppt at 10 nm threshold, 1 ppb at 20 nm Wetted surface materials before nebulization: PFA, PTFE, PEEK, sapphire Detector working fluid: Reagent-grade n-Butylalcohol Working fluid consumption rate: Approximately 150 mL/day (bottle lasts for oneweek) Ambient temperature range: 15-35°C (59-95°F) Ambient relative humidity range: 0-85% non condensing Maximum water temperature: 50°C(122°F) Dimensions (W × D × H): 42 × 43 × 27 (43 with bottle)cms, 16.7 × 16.8 × 10.5 (16.8 withbottle) inches Weight: 16.1 Kg (35.5lbs) Power (Nebulizer): Universal 100-240 VAC, 50/60 Hz, 90 W max Power (CPC): Universal 100-240 VAC, 50/60 Hz, 210 W max Output: RJ-45 for Modbus, USBFlashDrive Internal storage: MicroSD Ultrapure water inlet: ¼ inch PFA Flaretek® Waste outlet: ¼ inch SS Swagelok® Compressed air inlet: ¼ inch SS Swagelok® Detector vacuum: ¼ inch SS Swagelok® Port Display: 7 inch TFT Color, touch panel Shipping drain: Colder brand quickdisconnect Specifications subject to change without notice. 1E8 • >10nm 4.8E+06 • >15nm 1.2E+06 • >20nm 4.7E+05 Upstream Downstream Downstream 1E8 1E6 1E5 Scale 1E4 8 F3:Data 12 F4: Graph 0 4 F1:Status F2:Status • PatentProtected • Patent numbers 8,272,253 and 8,573,034 have been issued to CTA and licensed by KanomaxFMT. • Kanomax has applied for additional domestic and international patents for technology contained within theScanningTPC. • Patent number 7,852,465 has been issued to KanomaxFMT. The STPC was developed in collaboration with CT Associates,Inc. Kanomax FMT and the Kanomax Group have unique aerosol expertise and can deliver powerful solutions to your nanoparticle measurement challenges. Let’s get started - connect with ustoday! +1 651.762.7762 • ContactUs@KanomaxFMT.com • www.KanomaxFMT.com •Follow us on Facebook and LinkedIn Distributedby: Kanomax FMT,Inc. 4104 HoffmanRoad White Bear Lake, Minnesota 55110-3708 USA Phone +1 (651)762-7762 Fax +1 (651)762-7763 www.KanomaxFMT.com Flaretek is a registered trademark of Entegris, Inc. Swagelok is a registered trademark of Swagelok Company Printed in the USA.6/2019 Copyright © 2019 KanomaxFMT