DHM ®

1. 3D Reflectometry Module for DHMMeasurement of (semi-)transparent patterned depositions and liquids DHM® • This module is unique in optical microscopy for 3D structures within a range of nanometer to several microns!

2. Reflective vs. Semi-Transparent Materials x x • Sample 1: Gold • Purely reflective surface • Sample 2: SiO2 on Si • Multi-reflection on semi-transparent structure • Introduction • DHMReflectometry • Uniqueness • Applications • Analysis tool • Advanced • Conclusion Staircase Classical Optical Microscopy Full light spectrum XNo information on steps heights XColored information on steps heights but not quantitative X X Optical Profilometer measures true profile Xdoes not measure true profile measures true profile measures true profile DHM Reflectometry

3. A Simple Liquid Drop on Silicon Reconstructed height nair=1.0 • Introduction • DHMReflectometry • Uniqueness • Applications • Analysis tool • Advanced • Conclusion nLiq1=1.4 nSi=3.8 Interferometer: acquisition of an Optical Measure • A hole is measured • Not an artifact but a very valuable measurement on multi-reflection: Reflectometry Module: Interpretation based on physical laws of optics • low reflection on the drop, high reflection on the substrate • Different refractive indices between liquid and air: slower light speed through the drop DHM Reflectometry: Geometrical Measure •  The drop’s true profile is measured!

4. Challenge with (Semi-)Transparent Materials • Multilayer schematic • Layers with thicknesses di and reflective indices ni(i=1,2,…) • Ψillis the illumination wave • Ψr(r=0,1,…) are the multiple reflections • Introduction • DHMReflectometry • Uniqueness • Applications • Analysis tool • Advanced • Conclusion • The reflected wavefront is composed of • Reflection from the top layer • Multiple reflections within each interface • Topography measurement depends on each layer’s refractive indices and thicknesses • DHM Reflectometry retrieves both refractive indices and thicknesses

5. A Unique Measuring Module • Benefits from DHM’s unique features • 3D measurement without scanning • Considers global reflected signal • No need to differentiate a focal point on each interface as with confocal methods • Uses a laser specific wavelength • not the full spectrum of white light • Method verified and validated by scientific research • Introduction • DHMReflectometry • Uniqueness • Applications • Analysis tool • Advanced • Conclusion

6. What’s Unique with DHM Reflectometry Measure semi-transparent 3D structured layers Fast Insensitive to vibration • Introduction • DHMReflectometry • Uniqueness • Applications • Analysis tool • Advanced • Conclusion Patterns with nano- to micrometric thickness range Measure dynamic processes True real time acquisition, Non-scanning Non-damaging Non-invasive / Non-contact Moving liquid drop 3D study at camera rate of a (semi-)transparent material

7. Thicknesses of Nanometric steps Successful comparison with mechanical profilometry Non-contact, non-damaging Step edges are better highlighted with DHM Fast 3D characterization • Introduction • DHMReflectometry • Uniqueness • Applications • Geometrical • Refractive index • Analysis tool • Advanced • Conclusion SiO2staircase on Si wafer

8. Crater Depth in Si – SiO2 – Au • Structure too large to be measured with AFM • Successful profile comparison with other standard methods • DHM measures in nano- to micrometric range • Non-contact, non-damaging • Fast 3D characterization • Introduction • DHMReflectometry • Uniqueness • Applications • Geometrical • Refractive index • Analysis tool • Advanced • Conclusion • SIMS Calibration (Secondary Ion Mass Spectrometry for depth profiling)

9. Fluid Topography on a Substrate • Non-contact DHM is ideal for liquid structures ! • True real time 3D topography without scanning • Insensitive to vibration • Live acquisition enables study of micro-fluidics in 3D with dynamic phenomena • Introduction • DHMReflectometry • Uniqueness • Applications • Geometrical • Refractive index • Analysis tool • Advanced • Conclusion • Tetraethylene Glycol deposed on Si wafer

10. Liquid Deformed by an Air-jet • Study of temporal changes of a soft coating material • Full field of view without scanning • Non-contact • Flexible instrument • Large working space allows experiment build-up around the sample • Possibility of Measurement of an upside down sample • Introduction • DHMReflectometry • Uniqueness • Applications • Geometrical • Refractive index • Analysis tool • Advanced • Conclusion

11. Refractive Index Determination • DHM Reflectometry by fitting equations of physical laws • With a precision better than • 2x10-2 for the deposited material • 1x10-3 for the substrate material (wafer) • Refractive index enables determination of physical related properties • Dielectric constant/ permittivity (Hall Effect) • Local chemical concentration (e.g. Sugar dissolution) • Introduction • DHMReflectometry • Uniqueness • Applications • Geometrical • Refractive index • Analysis tool • Advanced • Conclusion

12. Acquisition and Analysis Software • DHM Koala Software for the acquisition • DHM Reflectometry software modulefor measurement and analysis • Ease of use with a large database • Materials with refractive indices • Sample models: multi-layer composition and thicknesses • Fast calculation • Layer thicknesses • Refractive indices • Introduction • DHMReflectometry • Uniqueness • Applications • Analysis tool • Advanced • Conclusion

13. Geometrical Measurement • Fast measurements 1D/2D Profile of • Layers thickness (nanometric up to several tens of µm) • Craters depth (<0, down to -10µm) • Deposition height (>0, up to several tens of µm in live mode) • Measurements on up to 3 layers • Or more if layer model is known • Introduction • DHMReflectometry • Uniqueness • Applications • Analysis tool • Advanced • Conclusion 3 Set of reference surface → zero setting 0 Layer 1 1 Layer 2 2 Layer 3 Semi-infinite Layer 4

14. Advanced Dynamic Study • Combination with Stroboscopic synchronization • for investigation of semi-transparent MEMS/MOEMS • With high speed camera for advanced microfluidics applications • Modular system, easily integrated for in-line QC • Introduction • DHMReflectometry • Uniqueness • Applications • Analysis tool • Advanced • Conclusion

15. Lyncée Tec – a Pioneer Company • Lyncée Tec • Leader in holographic microscopy • Owner of the key patents of the technology • 10 years of market experience • A team of experts • Gives you the appropriate support • Works with you to offer you the customized solution to meet your needs and solve your problems • Offers competent After-Sales Service • Offers a Price Competitive solution • Fast measurement • User friendly and flexible set-up A reliable partner focusing on continuous improvement • Introduction • DHMReflectometry • Uniqueness • Applications • Analysis tool • Advanced • Conclusion

16. DHM Reflectometry: New Possibilities • Topography of challenging (semi-)transparent materials • Patterned multi-layer thin films • Soft materials • Study of dynamic processes • Microfluidics and Wettability study • Dissolution, evaporation, corrosion, etc. • During Manufacturing, for ex. Deposition • And many more! • Introduction • DHMReflectometry • Uniqueness • Applications • Analysis tool • Advanced • Conclusion • Multi-layered MEMS • Patterned Semiconductors • Complex Nano-structures

17. Scientific Papers T. Colomb, Y. Emery, "Digital Holographic Reflectometry for Semi-Transparent Multilayers Measurement“, in ISOT'12 International Symposium on OptoMechatronic Technologies, Paris, France; 29-31 Oct. 2012. (2012). T. Colomb, Y. Emery, "Réfléctométrie Holographique Numérique Appliquée à la Métrologie des Fluides“, in Holophi, 1ere rencontre francophone d'holographie numérique appliquée à la métrologie des fluides 21-22 octobre 2010, CORIA, Rouen, France. (2010). T. Colomb, S. Krivec, H. Hutter, A. A. Akatay, N. Pavillon, F. Montfort, E. Cuche, J. Kühn, C. Depeursinge and Y. Emery, "Digital Holographic Reflectometry“, Optics Express 18 (4), 3719–3731 (2010).