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TiAlN/CrN 奈米結構多層硬膜

TiAlN/CrN 奈米結構多層硬膜. 電漿製程與分析研究室 指導教授 張銀祐. TiAl. Cr. Reactive gas, Ar. Substrate. -. -. +. +. -. Arc power supply. Bias power supply. +. TiAlN/CrN 奈米結構多層硬膜. 電漿光激發光譜分析. Nanolayered TiAlN/CrN coatings. Periodic thickness= 18 nm. Periodic thickness= 7 nm.

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TiAlN/CrN 奈米結構多層硬膜

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  1. TiAlN/CrN 奈米結構多層硬膜 電漿製程與分析研究室 指導教授 張銀祐

  2. TiAl Cr Reactive gas, Ar Substrate - - + + - Arc power supply Bias power supply + TiAlN/CrN 奈米結構多層硬膜

  3. 電漿光激發光譜分析

  4. Nanolayered TiAlN/CrN coatings Periodic thickness= 18 nm Periodic thickness= 7 nm

  5. AFM analysis of TiAlN/CrN

  6. Mechanical properties

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