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ME 381R Fall 2003 Micro-Nano Scale Thermal-Fluid Science and Technology Lecture 14: Electro-Thermal Simulation of Semico

ME 381R Fall 2003 Micro-Nano Scale Thermal-Fluid Science and Technology Lecture 14: Electro-Thermal Simulation of Semiconductor Devices. Dr. Li Shi Department of Mechanical Engineering The University of Texas at Austin Austin, TX 78712 www.me.utexas.edu/~lishi lishi@mail.utexas.edu.

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ME 381R Fall 2003 Micro-Nano Scale Thermal-Fluid Science and Technology Lecture 14: Electro-Thermal Simulation of Semico

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  1. ME 381R Fall 2003 Micro-Nano Scale Thermal-Fluid Science and Technology Lecture 14: Electro-Thermal Simulation of Semiconductor Devices Dr. Li Shi Department of Mechanical Engineering The University of Texas at Austin Austin, TX 78712 www.me.utexas.edu/~lishi lishi@mail.utexas.edu

  2. MOSFET

  3. Thermal Circuit Particle transport theory Fourier’s law of heat conduction

  4. Ideal MOSFET VG>0

  5. Pinch-Off & IV

  6. Joule Heating inHigh-Field Devices Localized heat generation near the pinch-off point

  7. Thermal Topographic Z T X X Thermometry of Nanoelectronics Scanning Thermal Microscope: Atomic Force Microscope (AFM) + Thermal Probe Laser Deflection Sensing Cantilever Temperature Sensor Sample X-Y-Z Actuator

  8. 10 mm Microfabricated Probes Pt Line Tip Pt-Cr Junction Laser Reflector SiNx Cantilever Cr Line Shi, Kwon, Miner, Majumdar, J. MicroElectroMechanical Sys., 10, p. 370 (2001)

  9. Self Heating Effect on I-V

  10. Optical Phonon Emission at High Field

  11. Heat Transfer Path

  12. Governing Equations for Electro-Thermal Simulation of Devices

  13. Example

  14. Computation Scheme

  15. Results

  16. Electric Field

  17. Electron Temperature

  18. Phonon Temperature

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