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Arbeitskreis EF-EELS Lausanne CH 29-30 September 2004

. OutlineRecording 3D spectrum-imaging data cube :application to EELS spectroscopyDefinition and performance in terms of energy and spatial resolution : How to improve them? Processing spectrum-image data cubes : quantification, deconvolution, MSA?Applications in various fields : elementalmapping, bond mapping, ultimate sensitivityFuture issues.

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Arbeitskreis EF-EELS Lausanne CH 29-30 September 2004

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    9. Image spectrum

    10. Series of 35 images (385 eV to 419 eV) N-K edge Slit width = 2eV Step size =1eV 256 x 256 images - exposure time: 15 s 1pixel = 0.27 nm

    11. Extraction of the local spectra : N-K in AlN and GaN layers

    12. Extraction of spectra at the interface

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