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slotline ring resonator(5GHz) W=350μm R=5459μm Zo=85 ohm ε eff =3.06 cpw fed w=300μm g=115μm Zo=50 ohm coupling gap=50 μm. Sonnet Error- EG2070: Illegal circuit parameter. Filename: C:WINDOWSDesktop.son Port 1 is not connected between two polygons.
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slotline ring resonator(5GHz) W=350μm R=5459μm Zo=85 ohm εeff =3.06 cpw fed w=300μm g=115μm Zo=50 ohm coupling gap=50 μm
Sonnet Error- EG2070: Illegal circuit parameter. Filename: C:\WINDOWS\Desktop\r.son Port 1 is not connected between two polygons.
microstrip ring resonator(5GHz) W=500μm R=3670μm Zo=50 ohm εeff =6.7685 coupling gap=50 μm
測試 ceramic substrate 的黃光參數 如下圖測試coplanar,resonator兩種圖形,線寬正確 玻璃光罩resonator 膠卷光罩coplanar
參數 光阻AZ1500 6000rpm 40s 80℃ 2m30s 505曝光箱 曝光時間 8m AZ300顯影 20s