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Cleaning of Hydrocarbon Buildup on Metallic-oxide Thin-Films

Cleaning of Hydrocarbon Buildup on Metallic-oxide Thin-Films. Richard Sandberg Shannon Lunt, Elke Jackson, Kristi Adamson, Ross Robinson, Guillermo Acosta, Nick Webb, Mike Dheil, Luke Bissell.

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Cleaning of Hydrocarbon Buildup on Metallic-oxide Thin-Films

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  1. Cleaning of Hydrocarbon Buildup on Metallic-oxide Thin-Films Richard Sandberg Shannon Lunt, Elke Jackson, Kristi Adamson, Ross Robinson, Guillermo Acosta, Nick Webb, Mike Dheil, Luke Bissell

  2. Purpose: Will the Opticlean polymer remove hydrocarbon? Does this cleaning process damage our thin films? Outline • Sample Creation &Contamination rate • Effects of hydrocarbon “goo” buildup • Opticlean Process • Opticlean Residue • Damage to thin films • Removing Opticlean Residue • Conclusions

  3. Sample Creation & Contamination Rate • Creation in vaccum chamber • RF Sputtering • Evaporation • Rates

  4. Reflectivity Effects With Goo Thickness

  5. Opticlean ProcessOpticlean Residue • Opticlean significantly removes goo, but leaves a residue • Ellipsometric Results • Goo thickness on two runs: • 17 Anstroms • 22 Anstroms

  6. Thin Film Damage • Scanning Electron Microscope with EDAX showed no thin film damage • X-Ray Photoelectric Spectroscopy found no metal traces

  7. Scanning Electron Microscope with EDAX

  8. X-Ray Photoelectric Spectroscopy

  9. Conclusions • Subsequent removal of Opticlean residue with plasma etch • Conclusion: Opiclean a very effective way to remove hydrocarbon buildup • Sufficiently removes goo • Does not damage the surface of thin film samples

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