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Europe Gases & Liquid Chemicals Committee Report

Europe Gases & Liquid Chemicals Committee Report. Updated October 22, 2014. Leadership. Committee Co-Chairs Jean-Marie Collard, Solvay Chemicals Gordon Ferrier, Gordon F Consulting. Committee Organization. EU Liquid Chemicals & Gases Committee C: Jean-Marie Collard (Solvay Chemicals)

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Europe Gases & Liquid Chemicals Committee Report

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  1. Europe Gases & Liquid Chemicals Committee Report Updated October 22, 2014

  2. Leadership • Committee Co-Chairs • Jean-Marie Collard, Solvay Chemicals • Gordon Ferrier, Gordon F Consulting

  3. Committee Organization EU Liquid Chemicals & Gases Committee C: Jean-Marie Collard (Solvay Chemicals) C: Gordon Ferrier (Gordon F Consulting) VC: Position open Precursor Specifications TF L: Paul Williams (SAFC Hitech) Permeation Tubes for Trace Moisture CalibrationTF L: Jean-Marie Collard (Solvay) L: Jim McKinley (KIN-TEK) Solvents in Advanced Processes TF L: Position open

  4. Meeting Information • Last Meeting • October 7, 2014 at SEMICON Europa, Grenoble, France • Next Meeting • To be announced

  5. Leadership Changes • Vice-Chair of TC • Gumaar De Vos is no longer VC • Position is open • Leader of Solvents in Advanced Processes TF • Gumaar De Vos is no longer leader • Position is open

  6. Ballot Results from Oct 2014 TC meeting • # 5656 Revision to SEMI C65 0308 with title change to: Guide For Trimethylsilane (3MS), 99.995% Quality • Ballot FAILED TC review, will be re-balloted in 2015 with suggested changes • # 5657 Revision to SEMI C66 0308 with title change to: Guide For Trimethylaluminium (TMAl), 99.5% Quality • Ballot FAILED TC review, will be re-balloted in 2015 with suggested changes • # 5658 New Standard: Guide for Pentakis (Dimethylamino) Tantalum (PDMAT) • Ballot FAILED TC review, will be re-balloted in 2015 with suggested changes • #5492 New Standard: Guide for Ethylene Glycol • PASSED as balloted and was submitted to A&R Committee

  7. New SNARFs from Oct 2014 TC meeting • No new SNARFs

  8. Existing SNARFs [1/2] 5325 New Standard: Dimethyl Dimethoxy Silane (DMDMOS) 5491 New Standard: Guide for Titanium Tetrachloride (TiCl4) 5493 New Standard: Guide for Octa Methyl Cyclo Tetra Siloxane (OMCTS)5494 New Standard: Guide for Tetra Methyl Cyclo Tetra Siloxane (TMCTS) 5495 New Standard: Guide for Cyclo Hexanone 5765 Revision to SEMI C15 : Test Method for ppm and ppb humidity standards 5327 New Standard: Guide for Monomethyl Silane 8

  9. Existing SNARFs [2/2] 5656 Revision to SEMI C65 0308 with title change to: Guide For Trimethylsilane (3MS), 99.995% Quality 5657 Revision to SEMI C66 0308 with title change to: Guide For Trimethylaluminium (TMAl), 99.5% Quality 5658 New Standard: Guide for Pentakis (Dimethylamino) Tantalum (PDMAT 9

  10. Upcoming Ballots for 2014 • Ballots up for vote in 2015 • 5765 Revision to SEMI C15 : Test Method for ppm and ppb humidity standards • 5656, 5657, 5658: to be re-balloted in 2015 • Somewhat likely to be presented at next TC meeting: • 5325 New Standard: Dimethyl Dimethoxy Silane (DMDMOS) • 5491 New Standard: Guide for Titanium Tetrachloride (TiCl4) • 5493 New Standard: Guide for Octa Methyl Cyclo Tetra Siloxane (OMCTS) • 5494 New Standard: Guide for Tetra Methyl Cyclo Tetra Siloxane (TMCTS) • 5495 New Standard: Guide for Cyclo Hexanone 10

  11. Precursor Specifications Task Force [1/2] • Leader: Paul Williams (SAFC Hitech) • Standards published : • SEMI C65 Guide for TriMethylSilane (3MS) • SEMI C66 Guide for TriMethylAluminium (TMAl) • SEMI C67 Guide for Hafnium Amides • SEMI C68 Guide for Zirconium Amides • SEMI C73 Guide for Hafnium Tetrachloride • SEMI C74 Guide for Hafnium t-Butoxide • SEMI C75 Guide for Tetrakis(Dimethylamino)Titanium (TDMAT) • SEMI C76 Guide for Zirconium t-Butoxide • SEMI C80 Guide for Tetrakis(Dimethylamino) Silane (TDMAS) • SEMI C81 Guide for Tris(Dimethylamino) Silane (3DMAS)

  12. Precursor Specifications Task Force [2/2] • SNARF’s • 5491 New Standard: Guide for Titanium Tetrachloride (TiCl4) • 5493 New Standard: Guide for Octa Methyl Cyclo Tetra Siloxane (OMCTS) • 5494 New Standard: Guide for Tetra Methyl Cyclo Tetra Siloxane (TMCTS) • 5325 New Standard: Dimethyl Dimethoxy Silane (DMDMOS) • 5658 New Standard : Guide for PDMAT (pentakis dimethyl amino Tantalum) • 5656 Revision to SEMI C65 : Guide for trimethyl silane (3MS) • 5657 Revision to SEMI C66 : Guide for trimethyl Aluminium (TMAl) • 5327 New Standard: Guide for Monomethyl Silane

  13. Solvents in Advanced Processes TF • Leader: Position is currently open • Standards Published: • SEMI C72 : Guide for PGME/PGMEA/mixture • SEMI C84 : Guide for Cyclopentanone • SEMI C85 : Guide for Methyl Isobutyl Carbinol (MIBC) • Standard Re-approved: • SEMI C53: Specifications for Dimethyl Sulfoxide (DMSO) • Standards to be Published After A&R Approval: • SEMI Cxx : New Standard: Guide for Ethylene Glycol • SNARF • 5495 New Standard: Guide for Cyclo Hexanone

  14. Permeation Tubes for Trace Moisture Calibration TF Leaders : Jean-Marie Collard, Solvay Jim McKinley, KIN-TEK SNARF 5765 Revision to SEMI C15 : Test Method for ppm and ppb humidity standards 14

  15. Questions? • Contact • James Amano (jamano@semi.org)/HQ • Kevin Nguyen (knguyen@semi.org)/HQ • Andrea Busch (abusch@semi.org)/Europe

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