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1 4 cluster ions - PowerPoint PPT Presentation

J.H. Liang, H.M. Han Department of Engineering and System Science National Tsing Hua University

COSIRES 2004. Implantation and post-annealing characteristics when impinging small B n clusters into silicon at low fluence. J.H. Liang, H.M. Han Department of Engineering and System Science National Tsing Hua University Hsinchu, Taiwan 30043, R.O.C. June 28-July 2, 2004. Helsinki, Finland.

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1 4 cluster ions - PowerPoint PPT Presentation

J.H. Liang, H.M. Han Department of Engineering and System Science National Tsing Hua University