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Extended Defects in c-Si (Claverie etc, MSSP 3, 269 (2000)

Extended Defects in c-Si (Claverie etc, MSSP 3, 269 (2000). CEC Inha University Chi-Ok Hwang. General Perspective. Materials Science in Semiconductor Processing (MSSP) Exact type of the predominant defects dependent on ion dose, energy and annealing conditions

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113 defects - PowerPoint PPT Presentation

Extended Defects in c-Si (Claverie etc, MSSP 3, 269 (2000)