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12 wafers 2 epi - PowerPoint PPT Presentation

Discussion on LGAD and other detectors with Avalanche Giulio Pellegrini

Discussion on LGAD and other detectors with Avalanche Giulio Pellegrini. New fabrication run. N-P Diodes, FZ 300um thick wafers. No guard ring structure. 8 wafers processed, 3 different p-implants. Metal grid. Wafer current mapping. I-V comparison. Wafers with different p+ implant doses.

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12 wafers 2 epi - PowerPoint PPT Presentation

Discussion on LGAD and other detectors with Avalanche Giulio Pellegrini