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20 nm barc thickness - PowerPoint PPT Presentation

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(a). (b). Figure 4.1 Film stack showing (a) the geometry for the standing wave derivation, and (b) a normally incident electric field E I. Figure 4.2 Standing wave intensity in one micron of photoresist on a silicon substrate for an i-line exposure.

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20 nm barc thickness - PowerPoint PPT Presentation

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