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311 defects fall - PowerPoint PPT Presentation

Post Anneal Solid State Regrowth

Post Anneal Solid State Regrowth. Implant Annealing/Activation. Ion. Individual Collision Cascades for < 10 12 cm -2. X-tal Surface. Amorphous Layer for > 10 15 cm -2. Damaged X-tal or Amorphous. Annealing - SSER > 450 C - Point Defects - Extended Defects Activation

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311 defects fall - PowerPoint PPT Presentation

Post Anneal Solid State Regrowth