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Si x Ge 1-x and Si x Ge 1-x O y Films as a Thermal Sensing Material

Si x Ge 1-x and Si x Ge 1-x O y Films as a Thermal Sensing Material. Mukti Rana and Donald Butler University of Texas at Arlington Electrical Engineering Dept. Arlington, TX 76019 Based in part by work supported by the National Science Foundation ECS-0322900.

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Si x Ge 1-x and Si x Ge 1-x O y Films as a Thermal Sensing Material