100+ Ald reactor PowerPoint (PPT) Presentations, Ald reactor PPTs

Ald reactor - PowerPoint PPT Presentation

How can ALD throughput be increased? Mikhail Erdmanis 07.05.2010

How can ALD throughput be increased? Mikhail Erdmanis 07.05.2010. Outline. ALD reactor types What defines ALD throughput Saturation character of ALD growth The ways to increase the grows rate Problems which appear while increasing the growth rate ALD coating of high aspect ratio structures

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289 views • 17 slides

S URFACE ENGINEERING 3

S URFACE ENGINEERING 3. Atomic Layer Deposition (ALD) Technology: Innovative Layer-by-Layer Design of New Materials, State-of-the-Art Surface Engineering & Nanostructuring. Comparison of the coating processes. Pri n cipal sc h em e of ALD. Advantages of ALD (1). Advantages of ALD ( 2 ).

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887 views • 12 slides

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Ald reactor - PowerPoint PPT Presentation

How can ALD throughput be increased? Mikhail Erdmanis 07.05.2010

S URFACE ENGINEERING 3