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New Graph Bipartizations for Double-Exposure, Bright Field Alternating Phase-Shift Mask Layout

New Graph Bipartizations for Double-Exposure, Bright Field Alternating Phase-Shift Mask Layout. Andrew B. Kahng (UCSD) Shailesh Vaya (UCLA) Alex Zelikovsky (GSU). Outline. Subwavelength lithography Alternating PSM Phase assignment problem Minimum perturbation problem

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New Graph Bipartizations for Double-Exposure, Bright Field Alternating Phase-Shift Mask Layout