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Monolithic Integration of Detectors and Transistors on High-Resistivity Silicon

Monolithic Integration of Detectors and Transistors on High-Resistivity Silicon. G.-F. Dalla Betta 1 , G. Batignani 2 , L. Bosisio 3 , M. Boscardin 4 , P. Gregori 4 , C. Piemonte 4 , L. Ratti 5 , G. Verzellesi 6 , N. Zorzi 4. 1 INFN Trento and University of Trento,Italy

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Bottom gate - PowerPoint PPT Presentation

Monolithic Integration of Detectors and Transistors on High-Resistivity Silicon