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Factors affecting the Depth of Field for SEM

Factors affecting the Depth of Field for SEM. Camtec workshop 2014 Aiko Kurimoto. Definition of Depth of Field. Depth of Field (DOF) Distance between the nearest and farthest objects in a scene that appear acceptably sharp in an image. Deep DOF. Shallow DOF. DOF for SEM.

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Factors affecting the Depth of Field for SEM