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Cd constraints - PowerPoint PPT Presentation

Yield- and Cost-Driven Fracturing for Variable Shaped-Beam Mask Writing

Yield- and Cost-Driven Fracturing for Variable Shaped-Beam Mask Writing. Andrew B. Kahng CSE and ECE Departments, UCSD Xu Xu CSE Department, UCSD Alex Zelikovsky CS Department, Georgia State University Partially supported by MARCO GSRC and NSF CCF 0429735. Outline. Introduction

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Cd constraints - PowerPoint PPT Presentation

Yield- and Cost-Driven Fracturing for Variable Shaped-Beam Mask Writing