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Toward Performance-Driven Reduction of the Cost of RET-Based Lithography Control

Toward Performance-Driven Reduction of the Cost of RET-Based Lithography Control . Dennis Sylvester (dennis@eecs.umich.edu), Jie Yang (Univ. of Michigan, Ann Arbor) Puneet Gupta, Andrew B. Kahng (UC San Diego). Outline . Trends in Mask Cost Design for Value

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Correction flow - PowerPoint PPT Presentation

Toward Performance-Driven Reduction of the Cost of RET-Based Lithography Control