'Device layer' presentation slideshows

Deep Etching Systems for Silicon and Silicon Dioxide

Deep Etching Systems for Silicon and Silicon Dioxide. Robert Dean Presentation 1 October 13, 2003. Questions. How does the Bosch process reduce sidewall etching? In the AOE process, what effect does increasing the H 2 concentration have on the etch rate?. Introduction. Terminology

704 views • 43 slides

MEMS-specific fabrication

MEMS-specific fabrication. Bulk micromachining Surface micromachining Deep reactive ion etching (DRIE) Other materials/processes. Bulk, Surface, DRIE. Bulk micromachining involves removing material from the silicon wafer itself Typically wet etched Traditional MEMS industry

1.03k views • 40 slides

MEMS-specific fabrication

MEMS-specific fabrication. Bulk micromachining Surface micromachining Deep reactive ion etching (DRIE) Other materials/processes. Bulk, Surface, DRIE. Bulk micromachining involves removing material from the silicon wafer itself Typically wet etched Traditional MEMS industry

441 views • 40 slides

From Ashcroft and Mermin, Solid State Physics.

From Ashcroft and Mermin, Solid State Physics. NEMS: TOWARD PHONON COUNTING: Quantum Limit of Heat Flow. Roukes Group Cal Tech Tito. Biological Nanomotor. Gene chips, proteomics arrays. Silicon wafer fabrication. Taken from www.egg.or.jp/MSIL/english/index-e.html.

535 views • 34 slides

Development of Generalized Device Layer for the COACK System

Development of Generalized Device Layer for the COACK System. M. Mutoh, Y. Shibasaki and I. Abe* Laboratory of Nuclear Science Graduate School of Physics, Tohoku University * High Energy Accelerator Research Organization (KEK). Contents. Architecture of control software.

325 views • 20 slides

Technology Infrastructure in Health Services

319 views • 18 slides

ICT Strategy

ICT Strategy. Intelligent Highways: Endpoint Adapters. Agenda. Intelligent Highways Roadside Devices Service-Oriented Device Architecture The OSGi Service Platform Device Management SODA Tools Streaming Services The Real-Time Enterprise Service Bus. Intelligent Highways.

355 views • 17 slides

Subject: Choice of Hardware Platform I nformal, Free discussion , Ji -Hwa Kim/PAL

Subject: Choice of Hardware Platform I nformal, Free discussion , Ji -Hwa Kim/PAL 1.Discussion scope? A hardware platform is the choice of your hardware for -the device(lower)layer for data acquisition/control to physical device. -user interface layer, -server ?

102 views • 1 slides