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Mechanical Properties of diamond-like carbon films grown by plasma CVD

Mechanical Properties of diamond-like carbon films grown by plasma CVD. By: Liwei Wang Instructor: Dr. Y. Tzeng For: ELEC 7730 Date: Oct 17, 2003. Questions. How the hydrogen incorporation induced in the DLC film deposition effect the mechanical properties?

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Mechanical Properties of diamond-like carbon films grown by plasma CVD