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Characterisation of the back-etched stack

Figure 6 Hillocks in a Pt film formed during PZT deposition. Department of Materials. Nanotechnology Centre. Effect Of Adhesive Wafer Transfer Processing On Ferroelectric Stacks With Different Top Electrodes. 1 P.Gkotsis , 1 R.V . Wright, 1 P.B.Kirby. Experiments- Results

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England email - PowerPoint PPT Presentation

Characterisation of the back-etched stack