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Practical Iterated Fill Synthesis for CMP Uniformity

Supported by Cadence Design Systems, Inc. Practical Iterated Fill Synthesis for CMP Uniformity. Y. Chen, A. B. Kahng, G. Robins, A. Zelikovsky (UCLA, UVA and GSU) http://vlsicad.cs.ucla.edu. Outline. Chemical-Mechanical Polishing (CMP) Filling Problem in fixed-dissection regime

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Practical Iterated Fill Synthesis for CMP Uniformity