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Automated Layout and Phase Assignment for Dark Field PSM

Automated Layout and Phase Assignment for Dark Field PSM. Andrew B. Kahng, Huijuan Wang, Alex Zelikovsky UCLA Computer Science Department http://vlsicad.cs.ucla.edu Supported by a grant from Cadence Design Systems, Inc. Outline. Phase assignment for dark field Alt PSM

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Find conflict graph - PowerPoint PPT Presentation

Automated Layout and Phase Assignment for Dark Field PSM