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DEVELOPMENT OF ION ENERGY DISTRIBUTIONS THROUGH THE PRE-SHEATH AND SHEATH IN DUAL-FREQUENCY CAPACITIVELY COUPLED PLASMAS

DEVELOPMENT OF ION ENERGY DISTRIBUTIONS THROUGH THE PRE-SHEATH AND SHEATH IN DUAL-FREQUENCY CAPACITIVELY COUPLED PLASMAS* Yiting Zhang a , Nathaniel Moore b , Walter Gekelman b and Mark J. Kushner a (a) Department of Electrical and Computer Engineering,

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DEVELOPMENT OF ION ENERGY DISTRIBUTIONS THROUGH THE PRE-SHEATH AND SHEATH IN DUAL-FREQUENCY CAPACITIVELY COUPLED PLASMAS