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Fabrication of integrated structures for coupling VCSEL to fibre

Fabrication of integrated structures for coupling VCSEL to fibre. Denis Wohlfeld, K.-H. Brenner Chair of Optoelectronics, University of Mannheim. Outline. Motivation: Coupling VCSEL to fibre Negative photoresist SU-8 SU-8 bevelled structures - problems & solutions Results Conclusion.

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Fabrication of integrated structures for coupling VCSEL to fibre