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Large scale nano - PowerPoint PPT Presentation

Scanning probe microscopy (SPM) and lithography

Scanning probe microscopy (SPM) and lithography. Atom and particle manipulation by STM and AFM. AFM oxidation of Si or metals. Dip-pen nanolithography (DPN). Resist exposure by STM field emitted electrons. Indentation, scratching, thermal-mechanical patterning.

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Large scale nano - PowerPoint PPT Presentation

Scanning probe microscopy (SPM) and lithography