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YY_MJK_ICOPS2009_01

EFFECT OF PRESSURE AND ELECTRODE SEPARATION ON PLASMA UNIFORMITY IN DUAL FREQUENCY CAPACITIVELY COUPLED PLASMA TOOLS * Yang Yang a) and Mark J. Kushner b) a) Department of Electrical and Computer Engineering Iowa State University, Ames, IA 50011, USA yangying@eecs.umich.edu

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YY_MJK_ICOPS2009_01