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Ferroelectric-RTA Standard Operation Procedures

Ferroelectric-RTA Standard Operation Procedures. By David Wu. Check to see if the system is OK. Check the gas valves. Check to see if the leak valve in the mechanical pump is closed. If no, close it. Check to see if the system is on operation condition ( green label ).

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Load process wafer - PowerPoint PPT Presentation

Ferroelectric-RTA Standard Operation Procedures