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Study of Heat Flux in a Thin Silicon MEMS Wafer with Coolant and Air Filled Regions A Finite Element Model (FEA) using

Study of Heat Flux in a Thin Silicon MEMS Wafer with Coolant and Air Filled Regions A Finite Element Model (FEA) using flexPDE. Craig E. Nelson - Consultant Engineer. Goal for the Numerical Study

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Mems wafer - PowerPoint PPT Presentation

Study of Heat Flux in a Thin Silicon MEMS Wafer with Coolant and Air Filled Regions A Finite Element Model (FEA) using