'Neutral temperature' presentation slideshows

602 views • 46 slides

Fluid Modeling of Capacitive Plasma Tools

Fluid Modeling of Capacitive Plasma Tools. FLCC Presentation March 28, 2005 Berkeley, CA David B. Graves, Mark Nierode, and Yassine Kabouzi UC Berkeley. Motivation. Capacitively-coupled plasma etch tools commonly used, especially in dielectric etch

482 views • 30 slides

Semantically-Enabled Virtual Observatories: VSTO Highlights for Observational Data

Semantically-Enabled Virtual Observatories: VSTO Highlights for Observational Data. Deborah McGuinness Acting Director and Senior Research Scientist Knowledge Systems, AI Laboratory Stanford University dlm@ksl.stanford.edu http://www.ksl.stanford.edu/people/dlm CEO McGuinness Associates

267 views • 13 slides