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Particle counter ks 41 - PowerPoint PPT Presentation

1. Problems of counting particles in photoresist 2. KS-41 Specifications

Particle Counter KS-41 for photoresist measurement. 1. Problems of counting particles in photoresist 2. KS-41 Specifications 3. Adjustment and calibration method 4. Actual measurement example. Principle of the Light scattering particle counter. Interaction between Light and Particle.

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Particle counter ks 41 - PowerPoint PPT Presentation

1. Problems of counting particles in photoresist 2. KS-41 Specifications