'Plasma potential' presentation slideshows

Chapter 7 Plasma Basic

Chapter 7 Plasma Basic. Hong Xiao, Ph. D. hxiao89@hotmail.com www2.austin.cc.tx.us/HongXiao/Book.htm. Objectives. List at least three IC processes using plasma Name three important collisions in plasma Describe mean free path Explain how plasma enhance etch and CVD processes

2.46k views • 90 slides

Capacitively Coupled Plasma Reactors and Etching

Capacitively Coupled Plasma Reactors and Etching. Rod Boswell Space, Plasma, Power and Propulsion Group ANU, Canberra rod.boswell@anu.edu.au. Topics for Thursday the 1 st of August 2013 ISPC Cairns. Concept of a positive plasma potential Electron temperature and energy distribution

2.23k views • 72 slides

VUV PHOTON SOURCE OF A MICROWAVE EXCITED MICROPLASMAS AT LOW PRESSURE*

VUV PHOTON SOURCE OF A MICROWAVE EXCITED MICROPLASMAS AT LOW PRESSURE* Peng Tian a ) , Mark Denning b ) , Randall Urdhal b ) and Mark J. Kushner a ) a) University of Michigan, Ann Arbor, MI 48109 USA tianpeng@umich.edu, mjkush@umich.edu

339 views • 27 slides

Ion Beam Cocktail Development and ECR Ion Source Plasma Physics Experiments at JYFL

Ion Beam Cocktail Development and ECR Ion Source Plasma Physics Experiments at JYFL. Olli Tarvainen 11th International Conference on Heavy Ion Accelerator Technology Venice, Italy 8-12 June 2009. Outline. JYFL accelerator laboratory Heavy ion beam cocktails for component irradiation at JYFL

499 views • 23 slides

Ion source related development work at JYFL

360 views • 20 slides

A. Samarian, W. Tsang, J. Khachan, B. James Complex Plasma Laboratory

A. Samarian, W. Tsang, J. Khachan, B. James Complex Plasma Laboratory School of Physics, University of Sydney, NSW 2006, Australia. Dust as a Diagnostic Tool to Measure. Potential Distribution in Plasma. Outline.

222 views • 15 slides