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Porous sio2 etch model - PowerPoint PPT Presentation

Arvind Sankaran 1 and Mark J. Kushner 2 1 Department of Chemical Engineering 2 Department of Electrical and Computer En

AVS 2002 Nov 3 - Nov 8, 2002 Denver, Colorado INTEGRATED MODELING OF ETCHING, CLEANING AND BARRIER COATING PVD FOR POROUS AND CONVENTIONAL SIO 2 IN FLUOROCARBON BASED CHEMISTRIES *. Arvind Sankaran 1 and Mark J. Kushner 2 1 Department of Chemical Engineering

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Porous sio2 etch model - PowerPoint PPT Presentation

Arvind Sankaran 1 and Mark J. Kushner 2 1 Department of Chemical Engineering 2 Department of Electrical and Computer En