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Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography

Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography. Unger et al. (Quake group, CALTECH) Science, 2000. EECE 491C. How complex and how big?. ENIAC, first large scale electronic and digital computer 30 tons, 19,000 vacuum tubes, 200 kW Towards integrated circuits

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Row multiplexor - PowerPoint PPT Presentation

Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography