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Multifunctional Wireless Microsystems with Assembled Nanosensors A. Narayanan, N.DiLello, V. Deshpande, S. Evoy, and S.

250 nm. 1.1. 1.3. 1.15. 1.2. 1.25. 1.2. Assembled NEMS. Buried Electrode. Top Electrode. Au. SnO 2. Au. Assembled NEMS. Buried Electrode. Top Electrode. Integration of Nanosensors. MUX. Nanowire. R. 1. (R. ). X. +. R. R. V. 2. 3. OUT. Readout. _. CMOS Two - Stage.

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Sandia natl - PowerPoint PPT Presentation

Multifunctional Wireless Microsystems with Assembled Nanosensors A. Narayanan, N.DiLello, V. Deshpande, S. Evoy, and S.