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Single wafer ald - PowerPoint PPT Presentation

How can ALD throughput be increased? Mikhail Erdmanis 07.05.2010

How can ALD throughput be increased? Mikhail Erdmanis 07.05.2010. Outline. ALD reactor types What defines ALD throughput Saturation character of ALD growth The ways to increase the grows rate Problems which appear while increasing the growth rate ALD coating of high aspect ratio structures

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Single wafer ald - PowerPoint PPT Presentation

How can ALD throughput be increased? Mikhail Erdmanis 07.05.2010