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Fabrication and Characterization of Ultra-narrow RRAM Cells

Fabrication and Characterization of Ultra-narrow RRAM Cells. Byoungil Lee and H.-S. Philip Wong Electrical Engineering, Stanford University. Outline. Motivations AlOx RRAM typical cell characteristics Fabrication of ultra-narrow RRAM cells Characterization of ultra-narrow cells

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Fabrication and Characterization of Ultra-narrow RRAM Cells