'Thin film technology instructor' presentation slideshows

Chapter 9 Thin film deposition

1.41k views • 42 slides

Introduction and application. Ion implantation tools. Dopant distribution. Mask thickness and lateral distribution. Effe

Chapter 8 Ion implantation. Introduction and application. Ion implantation tools. Dopant distribution. Mask thickness and lateral distribution. Effect of channeling. Damage caused by ion implantation. Damage repair. NE 343: Microfabrication and thin film technology

1k views • 40 slides

Introduction and application. Ion implantation tools. Dopant distribution profile.

Chapter 8 Ion implantation. Introduction and application. Ion implantation tools. Dopant distribution profile. Mask thickness and lateral distribution. Effect of channeling. Modeling: nuclear and electronic stopping. Damage caused by ion implantation. Damage repair.

931 views • 33 slides

Introduction to etching. Wet chemical etching: isotropic. Anisotropic etching of crystalline Si.

Chapter 10 Etching. Introduction to etching. Wet chemical etching: isotropic. Anisotropic etching of crystalline Si. Dry etching overview. Plasma etching mechanism. Types of plasma etch system. Dry etching issues. Dry etching method for various films.

4.12k views • 32 slides

Chapter 10 Etching

Chapter 10 Etching. Introduction to etching. Wet chemical etching: isotropic. Anisotropic etching of crystalline Si. Dry etching overview. Plasma etching mechanism. Types of plasma etch system. Dry etching issues. Dry etching method for various films.

3.13k views • 23 slides