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Process Development for ZnO-based Devices

Process Development for ZnO-based Devices. Kelly Ip PhD Defense ~ July 1, 2005 ~ University of Florida ~ Materials Science and Enginering. Outline. Introduction Inductively-coupled plasma (ICP) etching Hydrogen in ZnO Contact metallization Ohmic contacts Schottky contacts

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861 views • 44 slides

Deposition of thin films by sputtering method

Student Presentation of FYS-9310 Material Science of Semiconductor. Deposition of thin films by sputtering method. Feri Adriyanto. PhD student Microsystems and Nanotechnology Laboratory Department of Physics, University of Oslo. Outline. Introduction. Fundamental of sputtering.

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1.35k views • 24 slides

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Zno film - PowerPoint PPT Presentation

Process Development for ZnO-based Devices

Deposition of thin films by sputtering method