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Nano-Materials Characterization

Nano-Materials Characterization. Nano. Systems. Characterization. Design and. Growth and. Modeling. Processing. and Analysis. Yoram Shapira, EE Nano-bio-electronics 18.12.01. Nano-Materials Characterization. Nano-Materials Characterization.

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Nano-Materials Characterization

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  1. Nano-Materials Characterization Nano Systems Characterization Design and Growth and Modeling Processing and Analysis Yoram Shapira, EE Nano-bio-electronics 18.12.01

  2. Nano-Materials Characterization

  3. Nano-Materials Characterization

  4. Nano-Materials Characterization

  5. Transmission Electron Microscope (TEM)

  6. Nano-Materials Characterization

  7. Electron source: W, LaB6, FEG Condenser Lenses (Electromagnetic) Sample Objective Lens (determine the point resolution) Post Sample Lenses Detector: electron- light converter Chemical analysis: EDS, GIF Courtesy Yossi LEREAH Transmission Electron Microscope Wavelength at 200KV - 0.0025nm

  8. Nano-Materials Characterization Bragg’s Law2dsinq=lL Courtesy Yossi LEREAH

  9. Back Focal Plane: Diffraction Pattern Image Plane Diffraction Contrast: Bright Field or Dark Field by excluding one of the beams (in the back focal plane) Phase Contrast by including all beams Objective Lens The Core of TEM Courtesy Yossi LEREAH

  10. A branched Morphology in Material Science that is relevant to Life Science Contrast: Mass thickness, Bragg Conditions Diffraction: Polycrystalline, Preferred orientation Crystallization of Ge:Al (1) Yossi LEREAH TEL AVIV University

  11. Phase Contrast reveals the periodicity of the atoms. The interface is rough down to atomic scale Yossi LEREAH TEL AVIV UniversityCrystallization of Ge:Al (2) Courtesy Yossi LEREAH

  12. Melting temperature depends on the particle size. Existence of surface melting. Diffraction Contrast between solid and liquid phases Melting of Nano-Particles Yossi LEREAH TEL AVIV University

  13. Nano-Materials Characterization

  14. Nano-Materials Characterization Courtesy Yossi LEREAH

  15. Scanning Electron Microscope (SEM)

  16. Nano-Materials Characterization

  17. Collected signals in SEM Incident beam X-rays Backscattered electrons (BSE) Cathodoluminescence(CL) Secondary electrons (SE) Absorbed current Sample Courtesy Z. Barkay

  18. Energy distribution of SE and BSE Courtesy Z. Barkay

  19. Signal emission from interaction volume Rp Courtesy Z. Barkay

  20. The origin of high SE spatial resolution • High resolution SE(1): 1 nm • Lower resolution SE(2): 0.1-1 mm Courtesy Z. Barkay

  21. Composition dependence E=30keV Usually   0.1, at 30KeV =(z) Courtesy Z. Barkay

  22. Basic SEM modes of operation - summary (*) usually sizes of 1cm, dependent on SEM configuration (**) voltage and Z dependent Additional modes: Voltage contrast (VC) and EBIC - usually used in devices and p-n junctions. Courtesy Z. Barkay

  23. Eye of an ant Human hair Ant Courtesy A. Merson

  24. Nano-Materials Characterization

  25. Surface, Atomic number, Element imaging SE BSE Cu Courtesy Z. Barkay

  26. Nano-Materials Characterization Courtesy Z. Barkay

  27. Nano-Materials Characterization Courtesy Z. Barkay

  28. Nano-Materials Characterization

  29. Atomic mapping and analysis Cl Brr Agr Courtesy Z. Barkay

  30. Nano-Materials Characterization Courtesy CEA

  31. Nano-Materials Characterization

  32. Nano-Materials Characterization Auger Electron Spectroscopy

  33. Auger process Courtesy A. Merson

  34. Courtesy A. Merson

  35. a. X-ray fluorescence b. Auger emission Auger Emission Courtesy A. Merson

  36. Courtesy PHI

  37. Courtesy PHI

  38. Nano-Materials Characterization Courtesy PHI

  39. Courtesy PHI

  40. Nano-Materials Characterization Courtesy PHI

  41. Nano-Materials Characterization Courtesy PHI

  42. Nano-Materials Characterization Courtesy PHI

  43. Nano-Materials Characterization X-ray Photo-electron Spectroscopy

  44. Nano-Materials Characterization

  45. Nano-Materials Characterization Courtesy PHI

  46. Nano-Materials Characterization Courtesy PHI

  47. Nano-Materials Characterization Courtesy PHI

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