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OHM

N. EOLIM. Precision Linear Motion Technologies. OHM. OHM DEVELOPMENT. OHT Technologies. NEOLIM. OHM- OHANA ENGINEERS. OHM Implementation. OHM. Software's. N. EOLIM. Precision Linear Motion Technologies. Neolim Ltd. R&D Start - Up Company Founded : March of 1999.

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OHM

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  1. N EOLIM Precision Linear Motion Technologies OHM . . OHM DEVELOPMENT OHT Technologies NEOLIM OHM- OHANA ENGINEERS OHM Implementation OHM Software's

  2. N EOLIM Precision Linear Motion Technologies Neolim Ltd • R&D Start - Up Company • Founded : March of 1999. • Location : Beer Sheava. • USA patent : No- 5055733 , 1991 Micro motion to macro motion converting method.

  3. N EOLIM Precision Linear Motion Technologies PHA Applications • Precision positioning linear motor or actuator • Actuator valve • Dosage pump • Sensitive sensor

  4. N EOLIM Precision Linear Motion Technologies • Neolim Ltd. Focused • Positioning Applications: • Micro stages & Actuators • SME & Optic Systems • Polishing Systems • Vibration Damping System.

  5. N EOLIM Precision Linear Motion Technologies • Market Analysis • Precision Linear Motion System • Required performance improvements on • existing systems • Acceleration better than 0.2 g • Positioning Velocity better than 60 mm/sec • Low profile stages & actuators ( under 50 mm ) • Resolution & repeatability Better than 50 nm • Every thing with Low cost • Present technologies cannot meet future • performance demands

  6. N EOLIM Precision Linear Motion Technologies • PHA Technology provides the solutions for • unanswered demands • Reduced manufacturing time • Economic solutions

  7. N EOLIM Precision Linear Motion Technologies Advantages of the Technology • Sub Micron accuracy, repetition and Resolution ( 50nm). • Not influenced by magnetic fields • No need for additional energy to maintain load without motion • Clean-room compatible • Remote Hydraulic manipulation - by pipes • Simultaneous operation of few valves

  8. N EOLIM Precision Linear Motion Technologies Piezo Hydraulic Actuator (PHA)Technology Principle • The PHA consists of two stages: • First stage Piezo electric element, which provides motion up to 0.1 mm • Second stage Hydraulic Amplifier, which multiplies the motion up to 100 times

  9. N EOLIM Precision Linear Motion Technologies Piezo Hydraulic Actuator PHA Direct Type Stroke Sensor LOAD Oil Piezo Stack Driver Controller

  10. N EOLIM Precision Linear Motion Technologies PHA Advantages • Higher velocity & acceleration • High resolution, accuracy & repeatability (Sub-micron ) • Compact dimensions & Profile • High energy efficiency • Lower cost

  11. LOAD LOAD LOAD LOAD LOAD LOAD N EOLIM Precision Linear Motion Technologies Remote PHA Valve Stroke Signal Oil Piezo Stack PIEZO Control Signal Actuator Unit Remote Unit

  12. Remote PHA Load Valve Stroke Sensor Oil Piezo Stack Actuator Unit Driver Remote Unit Controller N EOLIM Precision Linear Motion Technologies

  13. N EOLIM Precision Linear Motion Technologies Remote PHA Advantages • Compact dimensions & profile(40x30 mm) • Higher velocity & acceleration • Resolution, accuracy & repeatability (50-100nm) • One base unit can operate few actuators • High energy efficiency • Lower cost

  14. LOAD N EOLIM Dosage PHA Precision Linear Motion Technologies Stroke Signal Hydraulic Fluid Container Piezo Stack Actuator Unit Remote Unit Control Signal

  15. N EOLIM Precision Linear Motion Technologies Dosage PHA Stroke Signal Container Valve Load Valve LOAD Oil Piezo Stack PIEZO Actuator Unit Remote Unit Oil Container Control Signal

  16. N EOLIM Precision Linear Motion Technologies LOAD Dosage 3PHA LOAD Container Valve LOAD Oil Piezo Stack PIEZO Remote Unit Oil Container Control Signal

  17. N EOLIM Precision Linear Motion Technologies Dosage PHA Principle of actions

  18. N EOLIM Precision Linear Motion Technologies Dosage PHA Advantages • Displacement – Few meters • Heavy Loads – Several tons • Highest resolution – 10nm

  19. N EOLIM Dosage Pump Precision Linear Motion Technologies Hydraulic Fluid Container Piezo Stack Remote Unit Actuator Unit Control Signal

  20. N EOLIM Precision Linear Motion Technologies Marketing potential • Semiconductor Manufacturing Equipment (SME) • Medical technologies • Optical systems • Automotive industries • Robotics systems

  21. N EOLIM Precision Linear Motion Technologies Positioning Applications

  22. N EOLIM Precision Linear Motion Technologies Positioning Applications ( II )

  23. N EOLIM Precision Linear Motion Technologies Vehicle Industry Applications • Fuel Injection valves • Variable valve timing & flexible profile • movement • Elec. Brake SysABS replacement & ELB ( electrical controlled braking System) • Vibration damping system

  24. N EOLIM Precision Linear Motion Technologies Silicon & Piezo Sensors -Dicing Systems. Linear Actuator Application • PHA advantages • Better acceleration 0.6 g • Increaseproductivity up to 50% • Actuator Specification: • Range :2 mm • Load : 40 Kg • Accuracy : 0.8 µm • Acceleration : 0.2g

  25. N EOLIM Precision Linear Motion Technologies Cooperation Company: Sagitta Ltd. Project: Remote PHA for silicon wafer polishing systems supply date March 2001 Purchase quantity\ year 30 system Estimation unit price 3500-5000$

  26. N EOLIM Precision Linear Motion Technologies R&D Status • Current Prototype • Direct PHA Specifications

  27. N EOLIM Precision Linear Motion Technologies Potential Markets • Semiconductor Manufacturing Equipment (SME) • Medical Technology • Optical Systems • Mtrology & Inspection • Polishing & honing systems • Printed circuit boards • Micro stages • Vibration Isolation • linear Actuator Valve

  28. N EOLIM Precision Linear Motion Technologies Semiconductor IndustryOverview

  29. N EOLIM Precision Linear Motion Technologies Semiconductor IndustryFlowchart PHA PHA PHA SME Industry PC Board Manufacturer Silicon Wafers Polishing . Computers Photo-lithography PC Board Assembly Consumer Electronics .Inspection . Chip Manufacture Other Other

  30. N EOLIM Precision Linear Motion Technologies Market Trends • Miniaturization and increased complexity of end products • Transition to larger wafers (300mm) and smaller line width • Rapid technological changes

  31. N EOLIM Precision Linear Motion Technologies Major Players Semiconductor Manufacturing Equipment Industry

  32. N EOLIM Precision Linear Motion Technologies Printed Circuit (PC) Boards • PC Board ManufacturingProcess: Create physical structure of PC Board • Use of PHA: Accurate positioning of boards • during printing process • PC Board AssemblyProcess: Assembly of finished boards • Use of PHA: Pick-n-place of components on the board

  33. N EOLIM Precision Linear Motion Technologies PC Boards Expected Growth until 2002 Manufacturing 7% each year Assembly 20% each year

  34. N EOLIM Precision Linear Motion Technologies PC Boards

  35. N EOLIM Precision Linear Motion Technologies Recommended Application Polishing & honing • High need for extreme accuracy • PHA can be sold at a premium price to polishing systems manufacturers • Increasing short-term demand for PHA • 300mm technology and smaller line-widthleads to new, more precise manufacturing & inspection equipment

  36. N EOLIM Precision Linear Motion Technologies Neo-Lim’s Competitors

  37. N EOLIM Precision Linear Motion Technologies The PHA in a MicroStage Testing of the new prototype in Neo-Lim’s laboratories Z-Stage low profile prototype

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