Sensors Software Service

1. Sensors Software Service

2. Presentation • The Company • Products • Applications Agenda

3. Companyprofile • 3D-Shape develops and produces optical measurement systems for industrial and medical applications worldwide • Founded in March 2001 - Spin off from the Chair for Optics, University of Erlangen • 6 shareholders • 10 employees + students and part time workers (trend: increasing numbers) History

4. Companyprofile • Patents for WLI, Deflectometry and Fringe Projection Systems (mirror construction) • Market leader for optical eye glass measurement systems • Fundamental technology competence in three different optical measurement methods • Worldwide fastest WLI • Worldwide largest WLI measurements fields • Customer oriented – Full-Service Concept Competences

5. White light interferometer KORAD3D • µKORAD3D Companyprofile • Fringe projection sensors FaceSCAN3D • BodySCAN3D • CAM3D • SCAN3D Measurements principles Product Overview • Phase measuring SpecGAGE3D • deflectometry • Software KorINSPECT3D SLIM3D / 3DViewer/

6. Advantages Explanations • Coaxial illumination and observation: No shading effects • Measurement in deep boreholes, with high resolution • Measurement of optically smooth and rough surfaces • Roughness of the surface = measurement uncertainty • Measurement uncertainty: Independent of aperture and working distance • Up to 4 Mio data points within a single scanning sequence White-Light-Interferometry

7. Products KORAD3D-S • Area: 2x2 - 13x13 mm2 • Camera: Up to 3 MP • Lat. Res: 1,1 – 7 µm • Uncertainty: ~ 1µm • Speed: Up to 500µm/sec White-Light-Interferometry

8. Products KORAD3D-M • Area: 13x13 - 40x40 mm2 • Camera: Up to 3 MP • Lat. Res: 7,5 – 23 µm • Uncertainty: ~ 1µm • Speed: Up to 500µm/sec White-Light-Interferometry

9. KORAD3D-L • Area: 55x55 mm² • lat. Res.: Up to 30 µm • Camera: Up to 3 MP • Uncertainty: ~ 1µm • Speed: Up to 500µm/sec Products White-Light-Interferometry

10. KORAD3D-XL • Area: 90x90 – 110x110 mm² • lat. Res.: Up to 50 µm • Camera: Up to 3 MP • Uncertainty: ~ 1µm • Speed: Up to 500µm/sec Products White-Light-Interferometry

11. Products µKORAD3D • Area 0.1mm to 1mm • lat. Resolution < 1µm • Uncertainty dz ~ 10nm White-Light-Interferometry

12. Products White-Light-Interferometry KorMASTER3D Semi-automatic measuring device for quality-control in the production Solid-housing Vibration-cushioned Dust Protection Splash Water Protection

13. Products KorINSPECT3D • Extensive software solution for in-line, semi-automatic and single measurements. • Includes the • control software for the measuring head, • the evaluation tools (e.g. planarity/step-height) and • 3 different input-levels. White-Light-Interferometry

14. Deep Boreholes (e.g. Injector nozzles) Ball-Grid-Arrays Applications Examples Engine-Parts (e.g. Valves) Sealing surfaces

15. Applications • Inline system – 24/7 • Application: • FoV 13 x 13 mm² • Measuring of dimensions of bumps (coplanarity) • Measuring of warpage • High speed (app. 1 sec.) for 100µm height Bumps and soldering paste height (electronic market)

16. Applications • Laboratory System µKORAD3D • Application: • FoV 0.9 x 0.7 mm² • Exact dimensions • High lateral resolution 1.3µm • High longitudinal precision << 1µm Bumps and soldering paste height (electronic market)

17. Applications • Inline system • Original Application: • FoV 15 x 15 mm² • Flatness <1 µm • Measurement time: 5 sec. Sealing surfaces

18. Applications • Semi-automatic system near the • production line • Original Application: • FoV 50 x 50 mm² • Flatness 5 µm • Step height 15-20 µm Rotary valve

19. Applications • Offline system – production line • Original Application: • FoV 3 x 3 mm² • Ø = 3mm, depth = 45mm • Measuring of cone angles • High precision ( = 0.02°) Injection nozzle

20. Products SpecGAGE3D • Field 20-500mm2, • Quantitative Asphere- measurement • Refr. error < 0.01 Dpt • Sensitivity ~ 1nm Deflectometry

21. Products Deflectometry SpecGAGE3D • 47‘‘ LCD-Panel for large fields of view. • Extendable measuring head. • Tracking camera for fast stitching. • Large castors for easy movability. Mobile measurement system for car windows, e.g. windshields.

22. Applications Deflectometry SpecGAGE3D Mobile measurement system for car windows, e.g. windshields. • Pseudocolor image of a complete windshield. • 6 measurements stitched together • Measurement time app. 4-6 min.

23. Most white-light interferometers employ the Michelson design. Light from a white source (with a coherence length of typically a few micrometres) is passed through a half-silvered mirror (beam splitter). The two resulting beams illuminate simultaneously the object for measurement and a reference mirror Explanations White-Light-Interferometry Light waves reflected by the object and the reference mirror pass through the beam splitter again and on a detector (camera chip). If the path length to the object matches the path length to the reference mirror, the instrument produces interference patterns that are sensed by the camera and can be analysed. Software interprets fluctuations in brightness in order to compute the object distance for each object point. As the object moves along the optical axis, a height map of the object with sub-micrometre precision can be created in this way. The scanning speed is typically between a few micrometres per second and 500 µm/s, depending on the precision required.

24. Explanations Measuring Principle

25. Explanations Deflectometry Local variations of the surface’s gradient cause deformations of the reflected fringe pattern. Thus, compared to other optical 3D sensors, deflectometry does not measure the local height of a surface but the local gradient. The shape of the surface can be calculated by integration of the measured slope data. Sinusoidal fringes are projected on a screen and observed by a camera using the specular surface under test as a mirror. As we cannot focus onto the surface and the reflected pattern at the same time, sinusoidal fringes are optimal for deflectometry – the phase does not change even if the fringes are blurred.