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Four Point Probe and Hall measurement

Four Point Probe and Hall measurement. Adviser ： Kuen-Hsien Wu Student ： Wei-Ming Lin. Outline. 1. Introduction. 2 . Principle. 3. Operation. 4. Conclusions. 5. References. Introduction.

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Four Point Probe and Hall measurement

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  1. Four Point Probe and Hall measurement Adviser：Kuen-Hsien Wu Student：Wei-Ming Lin

  2. Outline 1.Introduction 2. Principle 3. Operation 4. Conclusions 5. References

  3. Introduction Four-point probe measurement instrument mainly used for measuring the resistance of semiconductor thin films, that sheet resistance. Sheet resistanceis one of the important characteristics of a conductive material, particularly a conductive film. Sheet resistance will be the film thickness、grain size Inch and the impurity concentration and other factors. Therefore, in the course of the process, often carefully monitor sheet resistance .

  4. Principle I ρ＝V/I．W ．CF Rs = V/I ．CF Asd/s＞20 → CF~4.54 V W S S S sample d

  5. Operation 四點探針機台

  6. Operation 上機台輸入固定電流 下機台量測出電壓

  7. Operation 橫桿下拉 sample

  8. Operation 藍點要恆亮 Rs = 4.54 V/I 0.154767mV/1 μ A × 4.54 =701Ω

  9. Conclusions 1 Sample size and shape does not affect the measurement results, therefore, the sample does not have to make special specifications . 2 Four-point probe measurements silicon wafer with a metal film sheet resistancethe most common method. 3 Simple and fast, but more troublesome problem is to calculation results .

  10. Introduction In 1978, Edwin H.Hall input current in theconductor applied magnetic field. Conductor and the current direction the ends of the vertical , can measure the induced voltage . Can determine the polarity and concentration of carriers , Known as the Hall effect .

  11. Principle Z F＝ qVxBz Bz X qεy ＝ qVxBz εy ＝ VxBz y VH＝ εyW ＋ p-type VH － εx εy W Vx 正 P-type 負 n-type ＋ － ρ ＝RH /μp

  12. Operation

  13. Operation 將sample固定在量測基板上

  14. Operation 將量測基板插入量測架上

  15. Operation 在量測座上放磁石並進行量測

  16. Operation 開啟量測軟體

  17. Operation 出現霍爾量測系統畫面

  18. Operation 輸入膜厚

  19. Operation 得到data

  20. Hall measurements VS.Four-point probe

  21. Conclusions 1 Hall effect is mainly for detecting a semiconductor material,film samples can be measured resistivity, carrier concentration, carrier polarity, and mobility. 2 Rapid measurement , Simple operation, simple to operate a computer, you can complete the measurement step , the film is detected with a great help.

  22. References http://140.116.176.21/www/technique/SOP/SOP%204-Point%20Probe.pdf四點探針儀器介紹 http://ezphysics.nchu.edu.tw/prophys/basicexp/expnote/hall/hall_97Feb.pdf物理實驗-霍爾效應 http://mast-tech.com.tw/Resistivity%20Measurement.pdf 科豐國際有限公司

  23. Thank You

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