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Professor ： Dr. Yu-Sen Yang Speaker ： Jia-Hau Lin Date ： 2011.05.20

Effects of target current on the mechanical properties of Cr-C coatings by using the Unbalanced Magnetron Sputtering. Professor ： Dr. Yu-Sen Yang Speaker ： Jia-Hau Lin Date ： 2011.05.20. Outline. Introduction Experiment Results and discuss Conclusion. Introduction.

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Professor ： Dr. Yu-Sen Yang Speaker ： Jia-Hau Lin Date ： 2011.05.20

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  1. Effects of target current on the mechanical properties of Cr-C coatings by using the Unbalanced Magnetron Sputtering Professor： Dr. Yu-Sen Yang Speaker：Jia-Hau Lin Date ： 2011.05.20

  2. Outline Introduction Experiment Results and discuss Conclusion

  3. Introduction 1.The chromium carbide (Cr-C) films have excellent properties including chemical stability, oxidation resistance, low coefficient of friction and wear resistance. 2. The excellent anti-wear performance of Cr-C films can be attributed to the large content of carbide. 3. Cr-C coatings have been known to protected tools which may be damaged by high thermal load (high cutting speed).

  4. Experiment (equipment)

  5. Experiment (parameter) 資料來源:黃文毅，2010，利用非平衡磁控濺鍍Cr-C薄膜機械性質之研究，國立高雄第一科技大學，碩士論文

  6. Experiment (Properties test) 1.Component Analysis: EDS 2.Morphology: FE-SEM 3.Microstructure: Raman Analysis 4.Friction coefficient: Ball-on-disc

  7. Experiment (Properties test) 5.Wear rate estimation: Calculated after measuring wear track by Alpha-step (1)Alpha-Step量測磨痕斷面面積 (2)計算磨耗體積及磨耗率 V:體積，R:質心半徑，A:不規則形狀面積

  8. Results and discuss (ComponentAnalysis)

  9. Results anddiscuss(Friction coefficient test)

  10. Results anddiscuss (Wear rate) 單位:mm3‧N-1‧m-1

  11. Results and discuss (friction coefficient)

  12. Results and discuss (Wear rate)

  13. Results and discuss 1A 6A

  14. Results and discuss(Raman) D band ：1350 cm-1 G band：1580 cm-1

  15. Conclusions The experimental results show the carbon content in Cr-C films increase with decreasing target current when target current decrease from 6A to 1A,the carbon content increase from31.1 at.% to at 94.2 at.% . The friction coefficient of films decrease from 0.66 to 0.22 and the wear rate is reduced from 423‧10-6 (mm3‧N-1‧m-1) to 6‧10-6 (mm3‧N-1‧m-1) when the current reduced from 6A to 1A. The lowest wear rate is 6‧10-6 (mm3‧N-1‧m-1) at traget current 1A The lowest friction coefficient is 0.22at traget current 2A The excellent anti-wear performance of Cr-C films can be attributed to the large content of carbide.

  16. The reasons for a low coefficient of friction is the formation of solid solution carbon in the diamond-like carbon film in the crystal structure, which could effectively reduce wear and promote the wear resistance characteristics.

  17. The End

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