微波工程期中報告

1. 微波工程期中報告 老師：陳文山 班級：碩研電子一甲 姓名：朱士豪 學號：M9930201

2. On-Die Synthesized Inductors:Boon or Bane? Jim Wight, John R. Long,L. Richard Carley,and Tom Riley

3. Abstract • On-Die Spiral Inductors • On-Die Active Inductors • MEMS Based Inductors and Resonators • Analog FIR Resonators • Conclusion

4. Abstract>>On-Die Spiral Inductors>>On-Die Active Inductors>>MEMS Based Inductors and Resonators>>Analog FIR Resonators>>Conclusion • Alternative approaches have been developed to render the on-die inductor unnecessary. • FIR approaches are highly stable in performance and can be tunable, but require high speed clocks and generate unwanted spurious and alias signals. • The monolithic spiral inductor has been a key component in the development of portable wireless systems-on-chip in silicon technology. • The difference in response provides much-needed common-mode rejection on-chip. • Spiral inductors suffer from losses caused by energy dissipated in both the metal windings and the semiconducting silicon substrate.

5. Abstract>>On-Die Spiral Inductors>>On-Die Active Inductors>>MEMS Based Inductors and Resonators>>Analog FIR Resonators>>Conclusion Fig 1. (a) Symmetric square spiral inductor physical layout and (b) typical interconnect substrate cross-section. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?”

6. Figure 2. Typical inductor Q factor versus frequency.(L = 4.5 nH, 10-V-cm silicon substrate.) Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?” Figure 3. Shielded inductors [6], [9].(a) Ground-shielded square spiral inductor.(b) Differential shielding concept.(c) Differentially shielded symmetric spiral inductor. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?” Figure 4. Measured inductor Q factor on a 10 Ω-cm substrate. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?”

7. Abstract>>On-Die Spiral Inductors>>On-Die Active Inductors>>MEMS Based Inductors and Resonators>>Analog FIR Resonators>>Conclusion Table 1. Comparison of measured performance for passive spiral inductors on silicon. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?”

8. Figure 5. Two-transistor gyrator. (a) Block diagram.(b) Simplified two-FET small-signal equivalent circuit. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?”

9. Abstract>>On-Die Spiral Inductors>>On-Die Active Inductors>>MEMS Based Inductors and Resonators>>Analog FIR Resonators>>Conclusion Figure 6. A surface acoustic wave filter. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?” Figure 7. Example cross section through a bulk acoustic wave resonator. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?”

10. Figure 8. Simplified electrical model for resonator in vicinity of resonance. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?” Figure 9. Admittance of BAW resonator as function of frequency. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?”

11. Abstract>>On-Die Spiral Inductors>>On-Die Active Inductors>>MEMS Based Inductors and Resonators>>Analog FIR Resonators>>Conclusion Figure 10. Sampling RF filter. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?” Figure 11. Timing diagram for the current rotator clock buses. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?”

12. Figure 12. Spectral response of a bandpass filter having 256 tap currents. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?” Figure 13. Pass band performance of the bandpass filter. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?”

13. Abstract>>On-Die Spiral Inductors>>On-Die Active Inductors>>MEMS Based Inductors and Resonators>>Analog FIR Resonators>>Conclusion Table 2. Comparison of performance parameters for the various inductor/resonator realizations. Jim Wight, John R. Long,L. Richard Carley,and Tom Riley “On-Die Synthesized Inductors:Boon or Bane?” Spiral inductor Q factor increases with increasing intermetal dielectric and/or metal winding thicknesses and substrate resistivity. Substrate parasitics absorb less energy when the spiral is driven differentially,giving almost 2x improvement in peak-Q. Active inductors are used in specific situations such as peaking the response of RF amplifiers in LO chains, where dynamic range is less critical and a considerable savings in IC area may be realized compared to passive peaking coils.