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Inficon makes a combination Pirani /Diaphragm gauge that reads from 10^-4 torr to 1000 torr. It can be had with ceramic coated interior to use with corrosive gasses (like fluorinated gasses). It comes with local readout, and so does not need a $1000 readout. Price is $700.
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Inficon makes a combination Pirani/Diaphragm gauge that reads from 10^-4 torr to 1000 torr. It can be had with ceramic coated interior to use with corrosive gasses (like fluorinated gasses). It comes with local readout, and so does not need a $1000 readout. Price is $700. Introduce Fine Metering Valve to allow gradual evacuation and fill of panel to avoid shock. But pumping through a fine orifice is not good, so have a bypass valve for thorough vacuum pumping. Note that fine metering valve cannot shut off tightly, but that is OK. New pump fill station layout Fine Metering Valve DP Shut Off Valve DP Shut Off Valve Inficon Compound Gauge PUMP Swagelok Fittings Analog Gauge PANEL Supply I plan to use 2 of our ¼” flex lines for the connections from supply and to the panel (though the panel could be connected directly to the second cross). The flex lines have stub ends and so need Swagelok compression fitting adapters to VCR.