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The SEM and Ion Pumps

The SEM and Ion Pumps. UHV Systems. UHV – Ultra High Vacuum Pressures of less than 10^-11 mbar Pumps at an “atomic level”. Ion Pump. Also known as a “sputter ion pump” Ionizes and captures gas via high electric potentials Several different breeds, with common components. Penning Trap.

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The SEM and Ion Pumps

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  1. The SEM and Ion Pumps

  2. UHV Systems • UHV – Ultra High Vacuum • Pressures of less than 10^-11 mbar • Pumps at an “atomic level”

  3. Ion Pump • Also known as a “sputter ion pump” • Ionizes and captures gas via high electric potentials • Several different breeds, with common components.

  4. Penning Trap

  5. Standard Diode Pump • Contains one anode cathode set. • Common cathode material is Ti. • Efficiency/speed based on several factors.

  6. “Pumping Action” • Sputtered Ti atoms act as getters. • Chemisorption and physisorption. • Net decrease in targeted particles.

  7. Triode Pump • Contains one anode and two cathodes.

  8. Noble Diode Pump • Same design as a standard or triode pump. • Makes use of tantalum to capture rebounding neutrals. • Ideal for applications dealing with light inert gasses like He or H2

  9. Cost and Lifetime • Cost varies greatly... • Lifetime inversely proportional to pressure. • Industry standard at 40k hours at 1.3X10^-6 mbar

  10. Main Advantages • No moving parts.(In contrast to turbo molecular pumps, and diffusion pumps) • No vibrations. • Little maintenance, no “regeneration”

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