Contact: Dr. Carmen Moldovan, cmoldovan@imt.ro

1. Institution: National Institute for R&D in Microtechnologies Laboratory:Center for Microstructures and Microsystems for Bio-Medical and Environmental Applications  Service / Technology offer: CoventorWare 2005: CAD design and simulation for microstructures and microsystems. • Description: • CoventorWare 2005 is one of the most complete program suits for design for MEMS devices. It is working as am integrated environment, allowing design, behavioural modelling, 3D numerical analysis for almost any MEMS type, from accelerometersto RF devices, or from optical sensors to microfluidic devices. • The software contains design, technological processing and simulation modules. The numerical analysis are “finite elements” type, and they can be electrical (capacitive, piezoelectric, piezoresistive), mechanical, thermical, optical, frequency, etc. Also, one or more analysis types can be combined, making more complex analysis. • Characteristics: • CoventorWare 2005 is made of four main modules, which can be used independently or can be integrated in a complete analysis process. The four modules are: • Architect – A schematic environment, for level-system modelling, used for rapidly explore the design alternatives and for optimising the parameters; • Designer – Design environment, based on a lay-out editor (2D), database with material properties and a 3D structures automated generator; • Analyzer – Numerical analysis environment, “finite elements” type; • Integrator – Creates simplified MEMS models, from the previously created and simulated models, in Analyser. Utilisation: Design, simulation and optimisation for MEMS devices. Acceleration transducer Chemical microsensors array Temperature distribution map Contact: Dr. Carmen Moldovan, cmoldovan@imt.ro • Example (of projects, processes, devices realized using it: • Acceleration microtransducers, for automotive applications; • Micropelistors array, for combustive gases detection; • Chemical microsensors, for environmental monitoring. IMT-Bucharest, 32B Erou Iancu Nicolae, Bucharest Tel: +40.21.490.82.12; +40.21.490.84.12; Fax: +40.21.490.82.38 http://www.imt.ro